Electron beam deposition system for X-ray multilayer mirrors
نویسندگان
چکیده
منابع مشابه
Sputtered V/Al2O3 multilayer x-ray mirrors for the water window
We report on a novel type of multilayer mirrors for the soft x-ray regime, namely V/Al2O3 layered stacks, grown on sapphire (11-20) substrates by RF sputtering techniques. Experimental reflectivities obtained with soft x-ray synchrotron radiation from the BESSY I are presented. For ([V(1.25nm)/Al2O3(1.27nm)]50 multilayer a normal incidence reflectance of 0.14% is obtained at 247.5 eV and measur...
متن کامل14.5% near-normal incidence reflectance of Cr/Sc x-ray multilayer mirrors for the water window.
Cr/Sc multilayer mirrors, synthesized by ion-assisted magnetron sputter deposition, are proved to have a high near-normal reflectivity of R = 14.5% at a grazing angle of 87.5 degrees measured at the wavelength lambda = 3.11 nm, which is an improvement of more than 31% compared with previously published results. Elastic recoil detection analyses show that the mirrors contained as much as 15 at. ...
متن کاملA portable ultrahigh vacuum organic molecular beam deposition system for in situ x-ray diffraction measurements
A portable UHV molecular beam deposition system has been developed for synthesis, in situ, and real-time x-ray diffraction measurements of organic thin films, multilayers, and superlattices. The system has been optimized for small size, while still incorporating full features necessary to achieve thin film growth under molecular beam epitaxy ~MBE! conditions. It can be used independently for th...
متن کاملDevelopment of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies.
A portable metalorganic gas delivery system designed and constructed to interface with an existing molecular beam epitaxy chamber at beamline 33-ID-E of the Advanced Photon Source is described. This system offers the ability to perform in situ X-ray measurements of complex oxide growth via hybrid molecular beam epitaxy. The performance of the hybrid molecular beam epitaxy system while deliverin...
متن کاملReflection on multilayer mirrors: beam profile and coherence properties
The main advantage of Bragg reflection from a multilayer mirror as a monochromator for hard X-rays, is the higher photon flux density because of the larger spectral bandpass compared with crystal lattice reflection. The main disadvantage lies in the strong modulations of the reflected beam profile. This is a major issue for micro-imaging applications, where multilayer-based monochromators are f...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Bulletin of Materials Science
سال: 1996
ISSN: 0250-4707,0973-7669
DOI: 10.1007/bf02744645